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The composite materials highly enriched with carbon species attract rapidly growing attention motivated by a wide spectrum of their potential applications. This book describes the detailed investigations concerning processing and stability of thin films including carbon species and their possible application as materials of a low dielectric constant (low-k). In order to gather a complex information regarding the chemical, morphological and dielectric properties of the produced layers a combination of the spectroscopy: X-ray photoelectron spectroscopy (XPS), near edge X-ray absorption fine structure spectroscopy (NEXAFS) and Fourier transform infrared spectroscopy (FTIR), microscopy: atomic force microscopy (AFM) and electrical characterization: capacitance-voltage technique (CV) have been applied.
| Autorius: | Jolanta Klocek |
| Leidėjas: | Südwestdeutscher Verlag für Hochschulschriften AG Co. KG |
| Išleidimo metai: | 2015 |
| Knygos puslapių skaičius: | 148 |
| ISBN-10: | 3838132661 |
| ISBN-13: | 9783838132662 |
| Formatas: | 220 x 150 x 10 mm. Knyga minkštu viršeliu |
| Kalba: | Anglų |
Parašykite atsiliepimą apie „Thin carbon containing films: Processing, investigation and possible application“
