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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method¿s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
| Autorius: | Denise Reichel |
| Serija: | MatWerk |
| Leidėjas: | Springer Fachmedien Wiesbaden |
| Išleidimo metai: | 2016 |
| Knygos puslapių skaičius: | 140 |
| ISBN-10: | 3658113871 |
| ISBN-13: | 9783658113872 |
| Formatas: | 210 x 148 x 8 mm. Knyga minkštu viršeliu |
| Kalba: | Anglų |
Parašykite atsiliepimą apie „Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers“
