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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications

-15% su kodu: ENG15
71,98 
Įprasta kaina: 84,68 
-15% su kodu: ENG15
Kupono kodas: ENG15
Akcija baigiasi: 2025-03-03
-15% su kodu: ENG15
71,98 
Įprasta kaina: 84,68 
-15% su kodu: ENG15
Kupono kodas: ENG15
Akcija baigiasi: 2025-03-03
-15% su kodu: ENG15
2025-02-28 84.6800 InStock
Nemokamas pristatymas į paštomatus per 11-15 darbo dienų užsakymams nuo 20,00 

Knygos aprašymas

Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.

Informacija

Serija: Topics in Applied Physics
Leidėjas: Springer Berlin Heidelberg
Išleidimo metai: 2014
Knygos puslapių skaičius: 436
ISBN-10: 3662311046
ISBN-13: 9783662311042
Formatas: 235 x 155 x 24 mm. Knyga minkštu viršeliu
Kalba: Anglų

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