Atnaujintas knygų su minimaliais defektais pasiūlymas! Naršykite ČIA >>
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
| Leidėjas: | CRC Press |
| Išleidimo metai: | 2001 |
| Knygos puslapių skaičius: | 896 |
| ISBN-10: | 0824705068 |
| ISBN-13: | 9780824705060 |
| Formatas: | 260 x 183 x 52 mm. Knyga kietu viršeliu |
| Kalba: | Anglų |
Parašykite atsiliepimą apie „Handbook of Silicon Semiconductor Metrology“
