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The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
| Autorius: | Markus Graf, Andreas Hierlemann, Henry P. Baltes, Diego Barrettino, |
| Serija: | Microtechnology and MEMS |
| Leidėjas: | Springer Berlin Heidelberg |
| Išleidimo metai: | 2010 |
| Knygos puslapių skaičius: | 140 |
| ISBN-10: | 3642089100 |
| ISBN-13: | 9783642089107 |
| Formatas: | 235 x 155 x 8 mm. Knyga minkštu viršeliu |
| Kalba: | Anglų |
Parašykite atsiliepimą apie „CMOS Hotplate Chemical Microsensors“
