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The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Autorius: | Markus Graf, Andreas Hierlemann, Henry P. Baltes, Diego Barrettino, |
Serija: | Microtechnology and MEMS |
Leidėjas: | Springer Berlin Heidelberg |
Išleidimo metai: | 2007 |
Knygos puslapių skaičius: | 140 |
ISBN-10: | 3540695613 |
ISBN-13: | 9783540695615 |
Formatas: | 241 x 160 x 14 mm. Knyga kietu viršeliu |
Kalba: | Anglų |
Parašykite atsiliepimą apie „CMOS Hotplate Chemical Microsensors“